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Journal: Appl. Sci., 2016
Volume: 6
Number: 89
Article:
Investigation of Polishing Pads Impregnated with Fe and Al2O3 Particles for Single-Crystal Silicon Carbide Wafers
Authors:
by
Jihng-Kuo Ho, Chih-Yung Huang, Ming-Yi Tsai and Che-Cheng Tsai
Link:
https://www.mdpi.com/2076-3417/6/3/89
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