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Erratum: Jonathan Driedger and Meinard Müller. A Review of Time-Scale Modification of Music Signals. Applied Sciences 2016, 6, 57
Open AccessArticle

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, Hefei 230009, China
Anhui Electrical Engineering Professional Technique College, Hefei 230051, China
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
Author to whom correspondence should be addressed.
This paper is an extended version of paper published in the 9th International Symposium on Precision Engineering, Measurements and Instrumentation conference (ISPEMI9), Changsha, China, 8–11 August 2014.
Academic Editor: Chien-Hung Liu
Appl. Sci. 2016, 6(3), 86;
Received: 30 January 2016 / Revised: 4 March 2016 / Accepted: 14 March 2016 / Published: 18 March 2016
(This article belongs to the Special Issue Design and Applications of Coordinate Measuring Machines)
To measure various components with nano-scale precision, a new high-precision touch-trigger probe using a single low-cost sensor for a micro-coordinate measuring machine (CMM) is presented in this paper. The sensor is composed of a laser diode, a plane mirror, a focusing lens, and a quadrant photo detector (QPD). The laser beam from the laser diode with an incident angle is reflected by the plane mirror and then projected onto the quadrant photo detector (QPD) via the focusing lens. The plane mirror is adhered to the upper surface of the floating plate supported by an elastic mechanism, which can transfer the displacement of the stylus’s ball tip in 3D to the plane mirror’s vertical and tilt movement. Both motions of the plane mirror can be detected by respective QPDs. The probe mechanism was analyzed, and its structural parameters that conform to the principle of uniform sensitivity and uniform stiffness were obtained. The simulation result showed that the stiffness was equal in 3D and less than 1 mN/µm. Some experiments were performed to investigate the probe’s characteristics. It was found that the probe could detect the trigger point with uniform sensitivity, a resolution of less than 5 nm, and a repeatability of less than 4 nm. It can be used as a touch-trigger probe on a micro/nano-CMM. View Full-Text
Keywords: touch-trigger probe; stiffness; quadrant photo detector; coordinate measuring machine touch-trigger probe; stiffness; quadrant photo detector; coordinate measuring machine
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MDPI and ACS Style

Li, R.-J.; Xiang, M.; He, Y.-X.; Fan, K.-C.; Cheng, Z.-Y.; Huang, Q.-X.; Zhou, B. Development of a High-Precision Touch-Trigger Probe Using a Single Sensor. Appl. Sci. 2016, 6, 86.

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