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Journal: Appl. Sci., 2016
Volume: 6
Number: 42

Article: Design of an Image-Servo Mask Alignment System Using Dual CCDs with an XXY Stage
Authors: by Chih-Jer Lin, Hui-Hsiang Hsu, Chiang-Ho Cheng and Yu-Chung Li
Link: https://www.mdpi.com/2076-3417/6/2/42

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