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Journal: Appl. Sci., 2025
Volume: 15
Number: 7185
Article:
Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents
Authors:
by
Won Kim, Kiseok Lee, Hyosik Kim, Mingi Choi, Suk-Koo Hong and Ji Eun Lee
Link:
https://www.mdpi.com/2076-3417/15/13/7185
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