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Journal: Appl. Sci., 2024
Volume: 14
Number: 9490

Article: Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints
Authors: by Lei Gu, Naiqi Wu, Yan Qiao, Siwei Zhang and Tan Li
Link: https://www.mdpi.com/2076-3417/14/20/9490

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