Gu, L.; Wu, N.; Qiao, Y.; Zhang, S.; Li, T.
Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints. Appl. Sci. 2024, 14, 9490.
https://doi.org/10.3390/app14209490
AMA Style
Gu L, Wu N, Qiao Y, Zhang S, Li T.
Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints. Applied Sciences. 2024; 14(20):9490.
https://doi.org/10.3390/app14209490
Chicago/Turabian Style
Gu, Lei, Naiqi Wu, Yan Qiao, Siwei Zhang, and Tan Li.
2024. "Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints" Applied Sciences 14, no. 20: 9490.
https://doi.org/10.3390/app14209490
APA Style
Gu, L., Wu, N., Qiao, Y., Zhang, S., & Li, T.
(2024). Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints. Applied Sciences, 14(20), 9490.
https://doi.org/10.3390/app14209490