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Journal: Appl. Sci., 2024
Volume: 14
Number: 6972
Article:
NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control
Authors:
by
Steffen Hesse, Alex Huaman, Michael Katzschmann, Bianca Leistritz and Ludwig Herzog
Link:
https://www.mdpi.com/2076-3417/14/16/6972
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