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Journal: Appl. Sci., 2023
Volume: 13
Number: 3660

Article: Process Development of Low-Loss LPCVD Silicon Nitride Waveguides on 8-Inch Wafer
Authors: by Zhaoyi Li, Zuowen Fan, Jingjie Zhou, Qingyu Cong, Xianfeng Zeng, Yumei Zhang and Lianxi Jia
Link: https://www.mdpi.com/2076-3417/13/6/3660

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