1. Introduction
The development trend of light, thin, short, and small consumer products has led to the demand for micromachining processes, which require highly accurate, versatile, and stable micromachine tools [
1,
2,
3,
4]. The development of advanced micromachining technology to produce high-quality micro products with excellent dimensional tolerances is required. The innovation of micromachine tools plays an important role in micromachining applications in modern industry. Due to the miniaturized nature of micromachining systems, micromachining is different from conventional machining technology in terms of processes, tool, material, machine and equipment, which is challenging in the development of micromachining technology [
5]. To provide the high feed resolution and accuracy required micromachining processes, high-end driving units and CNC controllers have typically been used for the micromachines, but this also leads to a high cost for the machine. Considering the practical needs of industry, it would be better to achieve excellent machining performance while simultaneously maintaining the low cost of the micromachine tools when designing the machine.
To achieve high-precision feed movement, Park et al. [
6] proposed the use of hydraulic bearings to enhance the accuracy of platform displacement. Takeuci et al. [
7] also proposed a special mechanism design, so that the ultra-precision machine tool would experience lower contact friction during movement in order to achieve the goal of sub-micron feed accuracy. Wang et al. [
8] used surface curvature as guidance for feedrate adjustment to improve the machining efficiency of a diamond turning machining. However, this method generated micro-fluctuations in the machining process, deteriorating the surface quality. Currently, the hydraulic slide method, driven with linear motors, is widely used to enhance the feed resolution. The advantages include high speed, low friction, no backlash, and high resolution. However, it also possesses disadvantages, such as high manufacturing cost, the effect of thermal deformation error, and difficult assembly.
At present, micro CNC machine tools still widely use the traditional serial-connected type structure and configuration, with a high-precision servo feed system consisting of linear guide ways and a high-level controller in order to obtain high feed resolution and high positioning accuracy. This usually results in the machine having a high manufacturing cost, which influences willingness to use them. Wang et al. [
9] proposed a high-precision and low-cost micromachine tool with a double-toggle-type structure. The machine was able to provide ultra-precision feed resolution and positioning accuracy without using very high-end (expensive) driving components or an expensive CNC controller. To provide more flexible capability for micromachining implementation, Wang et al. [
10] further proposed a design for a micromachine tool with a tilt-drive mechanism. The mechanism was able to provide not only ultra-fine feed resolution and excellent positioning accuracy for micromachining, but also an adjustable feed resolution and work range for different micromachining applications. Mechanism design, structure design/analysis, kinematics analysis and volumetric error model were studied, and hybrid error analysis and machinability tests were carried out in the study. Wojciechowski et al. [
11] analyzed the micro end milling kinematics and geometric error of a micromachine tool, and established a model for predicting the cutting force during micro milling. Law et al. [
12] developed a methodology for evaluating and improving the dynamic performance of the machine tool in the design stage that made it possible to identify the weak machine components to avoid chatter in productivity.
On the basis of the reasons mentioned above, the main objective of this study is to design a multi-DOF co-plane synchronous driving mechanism with the advantages of high accuracy, low movement inertia effect, and low cost for a 4-DOF micromachine tool. The main features of the proposed machine include: (1) tilt-drive mechanism. This has a high precision resolution with a fixed full stroke, and can reduce the size of the machine and the number of key parts, thus reducing the sources of potential error, as well. (2) Co-planar multi-DOF platform. The mechanism uses three sets of drive mechanisms with slide rails and bearings, which allows the platform to have an X-, Z-axis translation movement and a B-axis rotation. In addition, the machine weight can be greatly reduced, and the cumulative error between the servo shaft load and the platform can be also reduced.
Because micromachine tools have very strict requirements with respect to the static/dynamic rigidity of the structure itself, the optimal structure/configuration design were confirmed on the basis of static/dynamic stiffness and dynamic compliance analysis, kinematic analysis, hybrid error analysis in this study to ensure that the expected high accuracy of the machine was achieved. In addition, the influences of major error sources in key components on the accuracy of the proposed machine were determined in order to provide guidelines for the detailed machine design. Furthermore, kinematic equations were derived to analyze the following motion characteristics: (a) the relationship between platform feed resolution and tilt-drive angle, (b) the relationship between X and Z travel of the co-planar platform and tilt-drive angle, (c) the relationship between platform rotation resolution and rotation angle, (d) the displacement, velocity and acceleration of platform translation and rotation characteristics, (e) the relationship between spindle seat feed resolution and tilt-drive angle, (f) the relationship between Y-axis travel and tilt-drive angle, (g) the analysis of the displacement, velocity and acceleration characteristics of the spindle seat. When designing the tilt-drive angle and working travel range for the co-planar multi-DOF horizontal machine tool, the kinematic characteristics analysis can be used to confirm whether the design of the tilt-drive angle and related dimensions is able to meet the requirements of the machine design specifications. In this study, the D-H rule and the homogeneous coordinate transformation matrix in robotics theory were used to establish the kinematic model. Error sources were added to the kinematic model in order to establish the total error model of the machine. This error model can be used for sensitivity analysis to determine the sensitivity parameters of the major error sources, and thus to evaluate the influences of the error sources on the accuracy of the machine.
Due to the advantages of co-plane synchronous driving mechanisms, the micromachine does not need to use a high-end servo drive system and CNC controller to achieve high feed resolution and high accuracy. Because the major driving units lie on the same plane, the machine has a low center of gravity and low movement inertia, resulting in stable and accurate movement. Finally, a prototype of the designed machine was built, and machining experiments were carried out to verify the feasibility and effectiveness of the design. The experimental results showed that the design was feasible and effective.
The structure of this manuscript is as follows. In
Section 2, the principle of the co-plane platform is elucidated. In addition, the kinematic characteristics of the machine tool structure are analyzed. In
Section 3, the error model of the proposed machine is developed and used to explore the relationship of between the major error sources. In addition, sensitivity analysis was also conducted to analyze the influences of the major error sources on the accuracy of the proposed machine. In
Section 4, verification experiments are carried out on the prototype machine and the results are discussed to confirm the accuracy and machinability of the proposed design and machine. Finally, the conclusions of this study are presented in
Section 5.
4. Accuracy and Machinability Test
The prototype machine was designed to have an X-, Y-, and Z-axis travel range of 60 × 40 × 40 mm, and the machine footprint is less than 60 × 60 cm, as shown in
Figure 16. A high-speed spindle with a maximum speed of 150,000 rpm was used. Three sets of tilt-servo mechanisms were used, and were installed on the base of the machine table. Since the machine is of the horizontal type, the X- and Z-axis driving mechanisms were responsible for translational motion, and the B-axis mechanism was designed for the rotation motion about the Y-axis. The fourth tilt-servo mechanism was installed on the machine column to translationally drive the spindle in the Y-axis direction. Due to the requirements of high rigidity, a double-column-type mechanism was designed for Y-axis driving unit. The machine table was supported by three supporting points. Ball bearings were installed on the supporting points to provide low-friction rotation freedom for the B-axis. A sliding connecting rod was installed under the bearing, so that the platform can move along the X- and Z-axis slide rails. The driving unit used for each translational axis was composed of a servo motor and a linear guideway module. The ASDA-A2 series servo motor produced by Delta Electronics Inc. with a high-precision encoder was used. The linear guideway module was model KK50 with a 2 mm ballscrew pitch and a 300 mm stroke produced by made by Hiwin Corp.
A HP5529 laser instrument was used to check the position accuracy and repeatability of the machine. The measurement of the laser instrument was applied for a long travel range, and the microcapacitance was used to check the accuracy of small movements. The measurements were taken at three locations for each axis. At each location, several small movements with 1-mm intervals were made. According to the calibration results, the positioning accuracy of the machine was less than 0.8 μm. In addition, a vision measurement system was implemented to check the rotation accuracy. It showed that the machine was able to achieve a rotation accuracy of 0.008°.
To conform the four-axis machinability of the machine, two micromachining experiments were conducted. In the experiments, a microcutter with a diameter of 0.2 mm, a spindle speed of 150,000 rpm and a feedrate of 300 mm/min was used to cut a copper workpiece.
Figure 17 shows the machined micro pattern, micro hole array, and micro characters. To verify the rotation degree of freedom of the B-axis, three micro holes were machined with tilting angles of 0°, 5°, and 10°.
Figure 18 shows the cutting results. The test results show that the machine was able to provide the expected cutting performance with the expected 4-DOF movement, high feed resolution, and high accuracy.