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Journal: Applied SciencesVolume: 11Number: 8028
Article: In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser
- Authors:
- Dong Wook Shin1,
- Lue Quan1 and
- Yuki Shimizu1,*
- et al.
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