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Lee S, Kim D, Cho Y, Kim E, Liu P, Kwak D-B, Keum S, Lim H, Kim T. Application of an Electrical Low Pressure Impactor (ELPI) for Residual Particle Measurement in an Epitaxial Growth Reactor. Applied Sciences. 2021; 11(16):7680. https://doi.org/10.3390/app11167680

Lee, Seungjae, Dongbin Kim, Yujin Cho, Eunmi Kim, Pengzhan Liu, Dong-Bin Kwak, Seungho Keum, Hongkang Lim, and Taesung Kim. 2021. "Application of an Electrical Low Pressure Impactor (ELPI) for Residual Particle Measurement in an Epitaxial Growth Reactor" Applied Sciences 11, no. 16: 7680. https://doi.org/10.3390/app11167680

Lee, S., Kim, D., Cho, Y., Kim, E., Liu, P., Kwak, D.-B., Keum, S., Lim, H., & Kim, T. (2021). Application of an Electrical Low Pressure Impactor (ELPI) for Residual Particle Measurement in an Epitaxial Growth Reactor. Applied Sciences, 11(16), 7680. https://doi.org/10.3390/app11167680