Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering
Abstract
:Featured Application
Abstract
1. Introduction
2. Principle
3. Dynamic Thermal Filtering to Achieve High Temperature Stability
3.1. Principle
3.2. Structure of DTFM Attenuator
3.3. Modeling
4. Agile Control to Achieve Quick Response and High Regulation Resolution
4.1. Principle
4.2. TEC Cooling Module
4.3. Tube Heating Module
4.4. Control Sub-System
5. Experiments and Discussion
5.1. Experimental Setup
5.2. Temperature Stability Experiment
5.3. Dynamic Performance Experiments
6. Conclusions
- (1)
- A dynamic thermal filtering method is proposed. The temperature stability of CCW is significantly improved by the demonstrated temperature fluctuation attenuator, based on the proposed method, while the dynamic performance of the CCW temperature control is not degraded. According to the concept of agile control, a thermoelectric cooling module, with a compact multilayer sandwich structure, as well as a heating module with a ‘solenoid-in-tube’ structure, are proposed, and thus the thermal inertia of the modules is minimized. Furthermore, bidirectional regulation of thermal power is realized with the proposed cooling and heating modules, based on the control of Fuzzy-PID. Therefore, the excellent dynamic performance of CCW temperature control is achieved.
- (2)
- Experiments were carried out to validate the performance of the enhanced CCW machine. The temperature stability was ±3 mK (peak-to-peak value), and its standard deviation was 1.2 mK. The settling time was 128 s, and the overshoot was 0.03 K for 1 K step of the set value of CCW temperature. The CCW temperature had a good performance against thermal impact.
Author Contributions
Funding
Conflicts of Interest
References
- Mayr, J.; Jedrzejewski, J.; Uhlmann, E.; Donmez, M.A.; Knapp, W.; Härtig, F.; Wendt, K.; Moriwaki, T.; Shore, P.; Schmitt, R.; et al. Thermal issues in machine tools. CIRP Ann. 2012, 61, 771–791. [Google Scholar] [CrossRef] [Green Version]
- Zhao, Y.; Trumper, D.L.; Heilmann, R.K.; Schattenburg, M.L. Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure. Precis. Eng. 2010, 34, 164–170. [Google Scholar] [CrossRef]
- Manske, E.; Jäger, G.; Hausotte, T.; Füßl, R. Recent developments and challenges of nanopositioning and nanomeasuring technology. Meas. Sci. Technol. 2012, 23, 074001. [Google Scholar] [CrossRef]
- Yamada, A. ArF immersion lithography for 45nm and beyond. In Proceedings of the SPIE—The International Society for Optical Engineering, Yukohama, Japan, 17–19 April 2007; Volume 6607, pp. 66071–66081. [Google Scholar]
- Tay, A.; Chua, H.T.; Wang, Y.; Ngo, Y.S. Equipment design and control of advanced thermal-processing module in lithography. IEEE Trans. Ind. Electron. 2009, 57, 1112–1119. [Google Scholar] [CrossRef]
- Chou, C.; DeBra, D.B. Liquid temperature control for precision tools. CIRP Ann. 1990, 39, 535–543. [Google Scholar] [CrossRef]
- Cui, L.Y.; Zhang, D.W.; Gao, W.G.; Qi, X.Y.; Shen, Y. Thermal errors simulation and modeling of motorized spindle. Adv. Mater. Res. 2010, 154, 1305–1309. [Google Scholar] [CrossRef]
- Lawton, K.M.; Patterson, S.R.; Keanini, R.G. Precision temperature control of high-throughput fluid flows: Theoretical and experimental analysis. J. Heat Transf. 2001, 123, 796–802. [Google Scholar] [CrossRef]
- Lawton, K.M.; Patterson, S.R.; Keanini, R.G. Direct contact packed bed thermal gradient attenuators: Theoretical analysis and experimental observations. Rev. Sci. Instruments 2003, 74, 2886–2893. [Google Scholar] [CrossRef] [Green Version]
- Oró, E.; De Gracia, A.; Castell, A.; Farid, M.; Cabeza, L.F. Review on phase change materials (PCMs) for cold thermal energy storage applications. Appl. Energy 2012, 99, 513–533. [Google Scholar] [CrossRef]
- Charvat, P.; Klimes, L.; Stetina, J.; Ostry, M. Thermal storage as a way to attenuate fluid-temperature fluctuations: Sensible-heat versus latent-heat storage materials. Mater. Tehnol. 2014, 48, 423–427. [Google Scholar]
- Alawadhi, E.M. Temperature regulator unit for fluid flow in a channel using phase change material. Appl. Therm. Eng. 2005, 25, 435–449. [Google Scholar] [CrossRef]
- Unni, P.K.M.; Gunasekaran, M.K.; Kumar, A. ±30 μK temperature controller from 25 to 103 °C: Study and analysis. Rev. Sci. Instrum. 2003, 74, 231–242. [Google Scholar] [CrossRef]
- Mann, G.; Hu, B.-G.; Gosine, R. Analysis of direct action fuzzy PID controller structures. IEEE Trans. Syst. Man Cybern. Part B Cybern. 1999, 29, 371–388. [Google Scholar] [CrossRef] [PubMed]
- Lim, H.S.; Kang, Y.T. Optimization of influence factors for water cooling of high temperature plate by accelerated control cooling process. Int. J. Heat Mass Transf. 2019, 128, 526–535. [Google Scholar] [CrossRef]
- Liu, T.; Gao, W.; Tian, Y.; Zhang, H.; Chang, W.; Mao, K.; Zhang, D. A differentiated multi-loops bath recirculation system for precision machine tools. Appl. Therm. Eng. 2015, 76, 54–63. [Google Scholar] [CrossRef] [Green Version]
- Enescu, D.; Virjoghe, E.O. A review on thermoelectric cooling parameters and performance. Renew. Sustain. Energy Rev. 2014, 38, 903–916. [Google Scholar] [CrossRef]
- Sun, K.; Qiu, Z.; Wu, H.; Xing, Y. Evaluation on high-efficiency thermoelectric generation systems based on differential power processing. IEEE Trans. Ind. Electron. 2018, 65, 699–708. [Google Scholar] [CrossRef]
- Huang, C.-W.; Pan, S.-T.; Zhou, J.-T.; Chang, C.-Y. Enhanced temperature control method using ANFIS with FPGA. Sci. World J. 2014, 2014, 1–8. [Google Scholar] [CrossRef] [PubMed]
Symbol | Parameter | Quantity and Unit |
---|---|---|
L | Length of tube | 0.7 m |
Rtube | Diameter of tube | 8 mm |
a | Center spacing between neighboring tubes | 32 mm |
N | Number of tubes | 36 |
b | Width of tank | 0.23 m |
l | Height of tank | 0.7 m |
La | Height of accumulator | 0.05 m |
Ld | Length of distributor | 0.05 m |
Fm | Total flow rate | 16 L/min |
© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Share and Cite
Lu, Y.; Cui, J.; Tan, J.; Bian, X. Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering. Appl. Sci. 2020, 10, 5483. https://doi.org/10.3390/app10165483
Lu Y, Cui J, Tan J, Bian X. Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering. Applied Sciences. 2020; 10(16):5483. https://doi.org/10.3390/app10165483
Chicago/Turabian StyleLu, Yesheng, Junning Cui, Jiubin Tan, and Xingyuan Bian. 2020. "Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering" Applied Sciences 10, no. 16: 5483. https://doi.org/10.3390/app10165483
APA StyleLu, Y., Cui, J., Tan, J., & Bian, X. (2020). Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering. Applied Sciences, 10(16), 5483. https://doi.org/10.3390/app10165483