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Journal: Actuators, 2022
Volume: 11
Number: 276
Article:
Development of a Sinusoidal Corrugated Dual-Axial Flexure Mechanism for Planar Nanopositioning
Authors:
by
Yuhan Niu, Xingyou Chen, Li Chen, Zhiwei Zhu and Peng Huang
Link:
https://www.mdpi.com/2076-0825/11/10/276
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