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Journal: Crystals, 2025
Volume: 15
Number: 913

Article: Influence of the Etching Material Deposition Rate and Annealing Time on Nanohole Morphology Etched into InP/In0.52Al0.48As Layers via Local Droplet Epitaxy
Authors: by Dennis Deutsch and Dirk Reuter
Link: https://www.mdpi.com/2073-4352/15/11/913

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