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Journal: Crystals, 2023
Volume: 13
Number: 910
Article:
Structural, Surface, and Optical Properties of AlN Thin Films Grown on Different Substrates by PEALD
Authors:
by
Sanjie Liu, Yangfeng Li, Jiayou Tao, Ruifan Tang and Xinhe Zheng
Link:
https://www.mdpi.com/2073-4352/13/6/910
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