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Journal: Crystals, 2023
Volume: 13
Number: 667
Article:
Surface Passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer
Authors:
by
Joonas Isometsä, Zahra Jahanshah Rad, Tsun H. Fung, Hanchen Liu, Juha-Pekka Lehtiö, Toni P. Pasanen, Oskari Leiviskä, Mikko Miettinen, Pekka Laukkanen, Kalevi Kokko, Hele Savin and Ville Vähänissi
Link:
https://www.mdpi.com/2073-4352/13/4/667
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