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Micromachines
Volume 16
Issue 12
10.3390/mi16121374
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

High-Quality and High-Efficiency Fabrication of Microlens Array by Rotary Profile Cutting Method

by
Liheng Gao
1,2,†,
Xiuwen Sun
1,2,†,
Qian Yu
1,2,*,
Yinhui Wang
3,
Md Nasir Uddin
1,2,
Ruijue Duan
4,
Gang Wang
1,2,
Zhikang Zhou
1,2,
Qiuchen Xie
1,2,
Tao Sun
4 and
Tianfeng Zhou
1,2,5,*
1
State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, Beijing 100081, China
2
School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
3
Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen 518055, China
4
School of Medical Technology, Beijing Institute of Technology, Beijing 100081, China
5
Chongqing Innovation Center, Beijing Institute of Technology, Chongqing 401120, China
*
Authors to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Micromachines 2025, 16(12), 1374; https://doi.org/10.3390/mi16121374 (registering DOI)
Submission received: 12 November 2025 / Revised: 27 November 2025 / Accepted: 28 November 2025 / Published: 1 December 2025
(This article belongs to the Special Issue Ultra-Precision Micro Cutting and Micro Polishing)
Versions Notes

Abstract

To enhance the fabrication consistency and surface quality of microlens array (MLA) molds, this study presents a high-quality and high-efficiency rotary profile-cutting (RPC) method conducted on a four-axis ultraprecision machining platform. A geometric model is established to define the relationship between tool parameters and microlens structural features, and the toolpath is optimized by refining control points to enhance machining accuracy. In addition, a novel tool-setting error characterization approach is developed, enabling submicron-level positioning of the diamond tool, with errors in the X and Y directions controlled within 1 μm. Experimental validation demonstrates the successful fabrication of a 6 × 6 square-array MLA mold with a curvature radius of 507 μm using the proposed RPC method. Subsequent replication of MLA through precision glass molding (PGM) yielded structures with a peak-to-valley (PV) value below 354 nm and surface roughness (Ra) below 11 nm. Optical performance tests confirm the high consistency and accuracy of the fabricated MLA, highlighting the potential of the proposed RPC technique for advanced optical component manufacturing.
Keywords: microlens array; rotary profile-cutting; tool setting errors; ultraprecision machining; glass molding microlens array; rotary profile-cutting; tool setting errors; ultraprecision machining; glass molding

Share and Cite

MDPI and ACS Style

Gao, L.; Sun, X.; Yu, Q.; Wang, Y.; Uddin, M.N.; Duan, R.; Wang, G.; Zhou, Z.; Xie, Q.; Sun, T.; et al. High-Quality and High-Efficiency Fabrication of Microlens Array by Rotary Profile Cutting Method. Micromachines 2025, 16, 1374. https://doi.org/10.3390/mi16121374

AMA Style

Gao L, Sun X, Yu Q, Wang Y, Uddin MN, Duan R, Wang G, Zhou Z, Xie Q, Sun T, et al. High-Quality and High-Efficiency Fabrication of Microlens Array by Rotary Profile Cutting Method. Micromachines. 2025; 16(12):1374. https://doi.org/10.3390/mi16121374

Chicago/Turabian Style

Gao, Liheng, Xiuwen Sun, Qian Yu, Yinhui Wang, Md Nasir Uddin, Ruijue Duan, Gang Wang, Zhikang Zhou, Qiuchen Xie, Tao Sun, and et al. 2025. "High-Quality and High-Efficiency Fabrication of Microlens Array by Rotary Profile Cutting Method" Micromachines 16, no. 12: 1374. https://doi.org/10.3390/mi16121374

APA Style

Gao, L., Sun, X., Yu, Q., Wang, Y., Uddin, M. N., Duan, R., Wang, G., Zhou, Z., Xie, Q., Sun, T., & Zhou, T. (2025). High-Quality and High-Efficiency Fabrication of Microlens Array by Rotary Profile Cutting Method. Micromachines, 16(12), 1374. https://doi.org/10.3390/mi16121374

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