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Micromachines 2018, 9(9), 444; https://doi.org/10.3390/mi9090444

A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

1
MEMS Center, Harbin Institute of Technology, Harbin 150001, China
2
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin Institute of Technology, Harbin 150001, China
3
State Key Laboratory of Urban Water Resource & Environment, Harbin Institute of Technology, Harbin 150001, China
*
Author to whom correspondence should be addressed.
Received: 9 August 2018 / Revised: 30 August 2018 / Accepted: 31 August 2018 / Published: 6 September 2018
(This article belongs to the Special Issue MEMS Accelerometers)
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Abstract

Sigma-delta (ΣΔ) closed-loop operation is the best candidate for realizing the interface circuit of MEMS accelerometers. However, stability and reliability problems are still the main obstacles hindering its further development for high-end applications. In situ self-testing and calibration is an alternative way to solve these problems in the current process condition, and thus, has received a lot of attention in recent years. However, circuit methods for self-testing of ΣΔ closed-loop accelerometers are rarely reported. In this paper, we propose a fifth-order ΣΔ closed-loop interface for a capacitive MEMS accelerometer. The nonlinearity problem of the system is detailed discussed, the source of it is analyzed, and the solutions are given. Furthermore, a built-in self-test (BIST) unit is integrated on-chip for in situ self-testing of the loop distortion. In BIST mode, a digital electrostatic excitation is generated by an on-chip digital resonator, which is also ΣΔ modulated. By single-bit ΣΔ-modulation, the noise and linearity of excitation is effectively improved, and a higher detection level for distortion is easily achieved, as opposed to the physical excitation generated by the motion of laboratory equipment. View Full-Text
Keywords: MEMS accelerometer; electromechanical delta-sigma; built-in self-test; in situ self-testing; digital resonator MEMS accelerometer; electromechanical delta-sigma; built-in self-test; in situ self-testing; digital resonator
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Chen, D.; Liu, X.; Yin, L.; Wang, Y.; Shi, Z.; Zhang, G. A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function. Micromachines 2018, 9, 444.

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