Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications

Sun, Jiayi; Maeno, Kenichi; Aki, Shoma; Sueyoshi, Kenji; Hisamoto, Hideaki; Endo, Tatsuro

doi:10.3390/mi9080410

Open AccessFeature PaperArticle

Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications

by

Jiayi Sun

¹,

Kenichi Maeno

¹,

Shoma Aki

¹,

Kenji Sueyoshi

¹,

Hideaki Hisamoto

¹ and

Tatsuro Endo

^1,2,*

¹

Department of Applied Chemistry, Osaka Prefecture University, Osaka 599-8531, Japan

²

Japan Science and Technology Agency (JST) Precursory Research for Embryonic Science and Technology (PRESTO), Tokyo 102-8666, Japan

^*

Author to whom correspondence should be addressed.

Micromachines 2018, 9(8), 410; https://doi.org/10.3390/mi9080410

Submission received: 29 May 2018 / Revised: 2 August 2018 / Accepted: 14 August 2018 / Published: 17 August 2018

(This article belongs to the Special Issue State-of-the-Art Lab-on-a-Chip Technology in Japan)

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Abstract

In this paper, we have proposed a polymer-based photonic crystal (PhC) resonator, with multiple sizes of cavities, and a waveguide to be used as highly sensitive optical sensor components. Properties of the proposed PhC were simulated by the finite-difference time-domain method, and the polymer-based PhC resonator and waveguide were fabricated on a photoresist (polymer) by electron beam lithography, which was prepared on an Au-layer-deposited Si substrate. We detected the resonant light that penetrated through the waveguide and was trapped in the PhC resonator. Optical characteristics of the fabricated PhC were evaluated by detecting the polymer layer deposition process by using the layer-by-layer (LbL) method to deposit polymer layers. As a result, by using an optimized design of a polymer-based PhC resonator with a long cavity (equivalent to a defect of three holes), the PhC structure changes caused by LbL deposition lead to changes in resonant light wavelength (peak shift: 5.26 nm/layer). Therefore, we suggest that a PhC resonator and a waveguide is applicable as an optical sensor.

Keywords: photonic crystal; resonator; waveguide; layer-by-layer method; optical sensor

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MDPI and ACS Style

Sun, J.; Maeno, K.; Aki, S.; Sueyoshi, K.; Hisamoto, H.; Endo, T. Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications. Micromachines 2018, 9, 410. https://doi.org/10.3390/mi9080410

AMA Style

Sun J, Maeno K, Aki S, Sueyoshi K, Hisamoto H, Endo T. Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications. Micromachines. 2018; 9(8):410. https://doi.org/10.3390/mi9080410

Chicago/Turabian Style

Sun, Jiayi, Kenichi Maeno, Shoma Aki, Kenji Sueyoshi, Hideaki Hisamoto, and Tatsuro Endo. 2018. "Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications" Micromachines 9, no. 8: 410. https://doi.org/10.3390/mi9080410

APA Style

Sun, J., Maeno, K., Aki, S., Sueyoshi, K., Hisamoto, H., & Endo, T. (2018). Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications. Micromachines, 9(8), 410. https://doi.org/10.3390/mi9080410

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications

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