Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor
Abstract
:1. Introduction
2. Materials and Methods
Resonator Design
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
- Cheng, C.M.; Yang, C.F. Develop quad-band (1.57/2.45/3.5/5.2 GHz) bandpass filters on the ceramic substrate. IEEE Microw. Wirel. Compon. Lett. 2010, 20, 268–270. [Google Scholar] [CrossRef]
- Rinaldi, M.; Zuniga, C.; Zuo, C.; Piazza, G. Super-high-frequency two-port AlN contour-mode resonators for RF applications. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 2010, 57, 38–45. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Li, Y.; Wang, C.; Kim, N.Y. A compact dual-band bandpass filter with high design flexibility using fully isolated coupling paths. Microw. Opt. Technol. Lett. 2014, 56, 642–646. [Google Scholar] [CrossRef]
- Wang, C.; Lee, W.S.; Zhang, F.; Kim, N.Y. A novel method for the fabrication of integrated passive device on SI-GaAs substrate. Int. J. Adv. Manuf. Technol. 2011, 52, 1011–1018. [Google Scholar] [CrossRef]
- Wang, C.; Kim, N.Y. Analytical optimization of high-performance and high-yield spiral inductor in integrated passive device technology. Microelectron. J. 2012, 43, 176–181. [Google Scholar] [CrossRef]
- Lin, C.-M.; Chen, Y.-Y.; Felmetsger, V.V.; Senesky, D.G.; Pisano, A.P. AlN/3C–SiC composite plate enabling high-frequency and high-Q micromechanical resonators. Adv. Mater. 2012, 24, 2722–2727. [Google Scholar] [CrossRef] [PubMed]
- Piazza, G.; Stephanou, P.J.; Pisano, A.P. Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators. J. Microelectromech. Syst. 2006, 15, 1406–1418. [Google Scholar] [CrossRef]
- Nam, C.M.; Jung, I.H. High performance RF integrated circuits using the Silicon based RF integrated passive device (RFIPD). In Proceedings of the 2005 Fifth International Conference on Information, Communications and Signal Processing, Bangkok, Thailand, 6–9 December 2005; pp. 1357–1361. [Google Scholar] [CrossRef]
- Jeon, H.; Kim, N.Y. A compact quadrature coupler on GaAs IPD process for LTE applications. IEICE Electron. Express 2013, 10, 1–5. [Google Scholar] [CrossRef]
- Li, Y.; Wang, C.; Kim, N.Y. Design of very compact bandpass filters based on differential transformers. IEEE Microw. Wirel. Compon. Lett. 2015, 25, 439–441. [Google Scholar] [CrossRef]
- Lin, C.-M.; Yen, T.-T.; Felmetsger, V.V.; Hopcroft, M.A.; Kuypers, J.H.; Pisano, A.P. Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications. Appl. Phys. Lett. 2010, 97, 083501. [Google Scholar] [CrossRef]
- Qiang, T.; Wang, C.; Kim, N.Y. A compact high-reliability high-performance 900-MHz WPD using GaAs-IPD technology. IEEE Microw. Wirel. Compon. Lett. 2016, 26, 498–500. [Google Scholar] [CrossRef]
- Bahl, I.J. Lumped Elements for RF and Microwave Circuits; Artech House, Inc.: Norwood, MA, USA, 2003; ISBN 1-58053-309-4. [Google Scholar]
- Mohan, S.S.; del Mar Hershenson, M.; Boyd, S.P.; Lee, T.H. Simple accurate expressions for planar spiral inductances. IEEE J. Solid-State Circuits 1999, 34, 1419–1424. [Google Scholar] [CrossRef]
- Luong, H.C.; Yin, J. Transformer-Based Design Techniques for Oscillators and Frequency Dividers; Springer International Publishing: Basel, Switzerland, 2016; pp. 9–12. [Google Scholar]
- Huang, C.H.; Chen, C.H.; Horng, T.S. Compact bandpass filter using novel transformer-based coupled filters on integrated passive device glass substrate. Microw. Opt. Technol. Lett. 2012, 54, 257–262. [Google Scholar] [CrossRef]
- Chuluunbaatar, Z.; Adhikari, K.K.; Wang, C.; Kim, N.Y. Micro-fabricated bandpass filter using intertwined spiral inductor and interdigital capacitor. Electron. Lett. 2014, 50, 1296–1297. [Google Scholar] [CrossRef]
- Kim, W.K.; Jung, Y.M.; Cho, J.H.; Kang, J.Y.; Oh, J.Y.; Kang, H.; Lee, H.J.; Kim, J.H.; Lee, S.; Shin, H.J.; et al. Radio frequency characteristics of graphene oxide. Appl. Phys. Lett. 2010, 97, 193103. [Google Scholar] [CrossRef]
- Kim, N.Y.; Adhikari, K.K.; Dhakal, R.; Chuluunbaatar, Z.; Wang, C.; Kim, E.S. Rapid, sensitive, and reusable detection of glucose by a robust radiofrequency integrated passive device biosensor chip. Sci. Rep. 2015, 67, 7807. [Google Scholar] [CrossRef] [PubMed]
- Chen, C.H.; Shih, C.S.; Horng, T.S.; Wu, S.M. Very miniature dual-band and dual-mode bandpass filter designs on an integrated passive device chip. Prog. Electromagn. Res. Lett. 2011, 119, 461–476. [Google Scholar] [CrossRef]
- Wang, C.; Lee, J.H.; Kim, N.Y. High-performance integrated passive technology by advanced SI-GaAs-based fabrication for RF and microwave applications. Microw. Opt. Technol. Lett. 2010, 52, 618–623. [Google Scholar] [CrossRef]
- Kim, N.K.; Dhakal, R.; Adhikari, K.K.; Wang, S.; Kim, E.S. A reusable robust RF biosensor using microwave resonator by integrated passive device technology for quantitative detection of glucose level. Biosens. Bioelectron. 2015, 67, 687–693. [Google Scholar] [CrossRef] [PubMed]
- Li, Y.; Wang, C.; Yao, Z.; Kim, N.Y. Very compact differential transformer-type bandpass filter with mixed coupled topology using integrated passive device technology. Microelectron. J. 2015, 46, 1459–1463. [Google Scholar] [CrossRef]
- Liu, K.; Frye, R.; Emigh, R. Bandpass filter with balun function from IPD technology. In Proceedings of the Electronic Components and Technology Conference, Lake Buena Vista, FL, USA, 27–30 May 2008; pp. 718–723. [Google Scholar]
- Chuluunbaatar, Z.; Wang, C.; Kim, N.Y. Internally loaded cross-coupled open-loop filters for a miniaturized bandpass filter using integrated passive device technology. Microw. Opt. Technol. Lett. 2014, 56, 2737–2740. [Google Scholar] [CrossRef]
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Kim, E.S.; Kim, N.Y. Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor. Micromachines 2018, 9, 294. https://doi.org/10.3390/mi9060294
Kim ES, Kim NY. Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor. Micromachines. 2018; 9(6):294. https://doi.org/10.3390/mi9060294
Chicago/Turabian StyleKim, Eun Seong, and Nam Young Kim. 2018. "Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor" Micromachines 9, no. 6: 294. https://doi.org/10.3390/mi9060294