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Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor

Radio Frequency Integrated Centre (RFIC), Kwangwoon University, Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea
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Micromachines 2018, 9(6), 294; https://doi.org/10.3390/mi9060294
Received: 16 April 2018 / Revised: 4 June 2018 / Accepted: 8 June 2018 / Published: 12 June 2018
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance)
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Abstract

This letter presents a high-performance micro-fabricated resonator based on inscribing a meandered-line square coupling capacitor in an air-bridged circular spiral inductor on the GaAs-integrated passive device (IPD) technology. The main advantages of the proposed method, which inserts a highly effective coupling capacitor between the two halves of a circular spiral inductor, are the miniaturized size, enhanced coupling coefficient, and improved selectivity. Moreover, using an air-bridge structure utilizes the enhanced mutual inductance in which it maximizes the self-inductance by a stacking inductor layout to obtain a high coupling effect. The simulated and measured S-parameters of a prototype resonator with an effective overall circuit size of 1000 µm × 800 µm are in good agreement. The measured insertion and return losses of 0.41 and 24.21 dB, respectively, at a measured central frequency of 1.627 GHz, as well as an upper band transmission zero with a suppression level of 38.7 dB, indicate the excellent selectivity of the developed resonator. View Full-Text
Keywords: air-bridge; bandpass filter; meandered-line coupling capacitor; micro-fabricated; spiral inductor air-bridge; bandpass filter; meandered-line coupling capacitor; micro-fabricated; spiral inductor
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Kim, E.S.; Kim, N.Y. Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor. Micromachines 2018, 9, 294.

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