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Article

Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization

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Laboratory for Integrated Micro Mechatronic Systems (LIMMS/CNRS-IIS), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
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Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520-IEMN, 59652 Villeneuve d’Ascq, France
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CNRS/IIS/COL/Lille University SMMiL-E Project, CNRS Délégation Nord-Pas de Calais et Picardie, 2 rue de Canonniers, Lille, Cedex 59046, France
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Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology, 2-4 Hibikino, Wakamatsu-ku, Kitakyushu-shi, Fukuoka 808-0196, Japan
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Centre for Interdisciplinary Research on Micro-Nano Methods, Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
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Tumorigenesis and Resistance to Treatment Unit, Centre Oscar Lambret, Université de Lille, 3 rue Frédéric Combemale, 59000 Lille, France
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INSERM U908 Laboratory, Lille University—Science and Technologies, Building SN3, 59655 Villeneuve d’Ascq, France
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NeuroInDx, Inc., 20725 S Western Ave #100, Torrance, CA 90501, USA
*
Authors to whom correspondence should be addressed.
Micromachines 2018, 9(6), 275; https://doi.org/10.3390/mi9060275
Received: 4 May 2018 / Revised: 25 May 2018 / Accepted: 29 May 2018 / Published: 1 June 2018
(This article belongs to the Special Issue State-of-the-Art Lab-on-a-Chip Technology in Japan)
This study combines the high-throughput capabilities of microfluidics with the sensitive measurements of microelectromechanical systems (MEMS) technology to perform biophysical characterization of circulating cells for diagnostic purposes. The proposed device includes a built-in microchannel that is probed by two opposing tips performing compression and sensing separately. Mechanical displacement of the compressing tip (up to a maximum of 14 µm) and the sensing tip (with a quality factor of 8.9) are provided by two separate comb-drive actuators, and sensing is performed with a capacitive displacement sensor. The device is designed and developed for simultaneous electrical and mechanical measurements. As the device is capable of exchanging the liquid inside the channel, different solutions were tested consecutively. The performance of the device was evaluated by introducing varying concentrations of glucose (from 0.55 mM (0.1%) to 55.5 mM (10%)) and NaCl (from 0.1 mM to 10 mM) solutions in the microchannel and by monitoring changes in the mechanical and electrical properties. Moreover, we demonstrated biological sample handling by capturing single cancer cells. These results show three important capabilities of the proposed device: mechanical measurements, electrical measurements, and biological sample handling. Combined in one device, these features allow for high-throughput multi-parameter characterization of single cells. View Full-Text
Keywords: single cell analysis; biophysical cell characterization; bioMEMS; microfluidics; MEMS design single cell analysis; biophysical cell characterization; bioMEMS; microfluidics; MEMS design
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MDPI and ACS Style

Takayama, Y.; Perret, G.; Kumemura, M.; Ataka, M.; Meignan, S.; Karsten, S.L.; Fujita, H.; Collard, D.; Lagadec, C.; Tarhan, M.C. Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization. Micromachines 2018, 9, 275. https://doi.org/10.3390/mi9060275

AMA Style

Takayama Y, Perret G, Kumemura M, Ataka M, Meignan S, Karsten SL, Fujita H, Collard D, Lagadec C, Tarhan MC. Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization. Micromachines. 2018; 9(6):275. https://doi.org/10.3390/mi9060275

Chicago/Turabian Style

Takayama, Yuki, Grégoire Perret, Momoko Kumemura, Manabu Ataka, Samuel Meignan, Stanislav L. Karsten, Hiroyuki Fujita, Dominique Collard, Chann Lagadec, and Mehmet C. Tarhan. 2018. "Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization" Micromachines 9, no. 6: 275. https://doi.org/10.3390/mi9060275

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