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Journal: Micromachines, 2018
Volume: 9
Number: 231

Article: Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes
Authors: by Hani H. Tawfik, Mohannad Y. Elsayed, Frederic Nabki and Mourad N. El-Gamal
Link: https://www.mdpi.com/2072-666X/9/5/231

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