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Open AccessArticle

Frequency Tuning of Graphene Nanoelectromechanical Resonators via Electrostatic Gating

1
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
2
Electrical Engineering, Case School of Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
*
Authors to whom correspondence should be addressed.
Micromachines 2018, 9(6), 312; https://doi.org/10.3390/mi9060312
Received: 16 April 2018 / Revised: 11 May 2018 / Accepted: 31 May 2018 / Published: 20 June 2018
(This article belongs to the Special Issue Carbon Based Materials for MEMS/NEMS)
In this article, we report on a comprehensive modeling study of frequency tuning of graphene resonant nanoelectromechanical systems (NEMS) via electrostatic coupling forces induced by controlling the voltage of a capacitive gate. The model applies to both doubly clamped graphene membranes and circumference-clamped circular drumhead device structures. Frequency tuning of these devices can be predicted by considering both capacitive softening and elastic stiffening. It is shown that the built-in strain in the device strongly dictates the frequency tuning behavior and tuning range. We also find that doubly clamped graphene resonators can have a wider frequency tuning range, while circular drumhead devices have higher initial resonance frequency with same device characteristic parameters. Further, the parametric study in this work clearly shows that a smaller built-in strain, smaller depth of air gap or cavity, and larger device size or characteristic length (e.g., length for doubly clamped devices, and diameter for circular drumheads) help achieve a wider range of electrostatic frequency tunability. This study builds a solid foundation that can offer important device fabrication and design guidelines for achieving radio frequency components (e.g., voltage controlled oscillators and filters) with the desired frequencies and tuning ranges. View Full-Text
Keywords: nanoelectromechanical systems (NEMS); graphene resonators; electrostatic gate tuning; frequency tuning model nanoelectromechanical systems (NEMS); graphene resonators; electrostatic gate tuning; frequency tuning model
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MDPI and ACS Style

Mei, T.; Lee, J.; Xu, Y.; Feng, P.X.-L. Frequency Tuning of Graphene Nanoelectromechanical Resonators via Electrostatic Gating. Micromachines 2018, 9, 312.

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