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Journal: Micromachines, 2018
Volume: 9
Number: 104
Article:
Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System
Authors:
by
Jiahong Zhang, Jianxiang Chen, Min Li, Yixian Ge, Tingting Wang, Peng Shan and Xiaoli Mao
Link:
https://www.mdpi.com/2072-666X/9/3/104
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