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Journal: Micromachines, 2018
Volume: 9
Number: 74
74
Article: Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method
Authors: by Jia-Cheng Yu, Zai-Fa Zhou, Jia-Le Su, Chang-Feng Xia, Xin-Wei Zhang, Zong-Ze Wu and Qing-An Huang
Link: https://www.mdpi.com/2072-666X/9/2/74

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