Yu, J.-C.; Zhou, Z.-F.; Su, J.-L.; Xia, C.-F.; Zhang, X.-W.; Wu, Z.-Z.; Huang, Q.-A.
Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method. Micromachines 2018, 9, 74.
https://doi.org/10.3390/mi9020074
AMA Style
Yu J-C, Zhou Z-F, Su J-L, Xia C-F, Zhang X-W, Wu Z-Z, Huang Q-A.
Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method. Micromachines. 2018; 9(2):74.
https://doi.org/10.3390/mi9020074
Chicago/Turabian Style
Yu, Jia-Cheng, Zai-Fa Zhou, Jia-Le Su, Chang-Feng Xia, Xin-Wei Zhang, Zong-Ze Wu, and Qing-An Huang.
2018. "Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method" Micromachines 9, no. 2: 74.
https://doi.org/10.3390/mi9020074
APA Style
Yu, J.-C., Zhou, Z.-F., Su, J.-L., Xia, C.-F., Zhang, X.-W., Wu, Z.-Z., & Huang, Q.-A.
(2018). Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method. Micromachines, 9(2), 74.
https://doi.org/10.3390/mi9020074