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Micromachines 2018, 9(2), 66;

Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors

School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China
Department of Instrumental and Electrical Engineering, Xiamen University, Xiamen 361005, China
Xiamen Key Laboratory of Optoelectronic Transducer Technology, Xiamen 361005, China
Fujian Key Laboratory of Universities and Colleges for Transducer Technology, Xiamen 361005, China
School of Mathematical Sciences, Xiamen University, Xiamen 361005, China
Authors to whom correspondence should be addressed.
Received: 24 December 2017 / Revised: 18 January 2018 / Accepted: 1 February 2018 / Published: 2 February 2018
(This article belongs to the Special Issue Nanostructure Based Sensors for Gas Sensing: from Devices to Systems)
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Electrospray is a simple and cost-effective method to fabricate micro-structured thin films. This work investigates the electrospray process of ZnO patterns. The effects of experimental parameters on jet characteristics and electrosprayed patterns are studied. The length of stable jets increases with increasing applied voltage and flow rate, and decreases with increasing nozzle-to-substrate distance, while electrospray angles exhibit an opposite trend with respect to the stable jet lengths. The diameter of electrosprayed particles decreases with increasing applied voltage, and increases with flow rate. Furthermore, an alcohol gas sensor is presented. The ZnAc is calcined into ZnO, which reveals good repeatability and stability of response in target gas. The sensing response, defined as the resistance ratio of R0/Rg, where R0 and Rg are resistance of ZnO in air and alcohol gas, increases with the concentration of alcohol vapors and electrospray deposition time. View Full-Text
Keywords: electrospray; ZnO; gas sensor; semiconductor electrospray; ZnO; gas sensor; semiconductor

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Li, W.; Lin, J.; Wang, X.; Jiang, J.; Guo, S.; Zheng, G. Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors. Micromachines 2018, 9, 66.

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