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Open AccessArticle

Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors

1
School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China
2
Department of Instrumental and Electrical Engineering, Xiamen University, Xiamen 361005, China
3
Xiamen Key Laboratory of Optoelectronic Transducer Technology, Xiamen 361005, China
4
Fujian Key Laboratory of Universities and Colleges for Transducer Technology, Xiamen 361005, China
5
School of Mathematical Sciences, Xiamen University, Xiamen 361005, China
*
Authors to whom correspondence should be addressed.
Micromachines 2018, 9(2), 66; https://doi.org/10.3390/mi9020066
Received: 24 December 2017 / Revised: 18 January 2018 / Accepted: 1 February 2018 / Published: 2 February 2018
(This article belongs to the Special Issue Nanostructure Based Sensors for Gas Sensing: from Devices to Systems)
Electrospray is a simple and cost-effective method to fabricate micro-structured thin films. This work investigates the electrospray process of ZnO patterns. The effects of experimental parameters on jet characteristics and electrosprayed patterns are studied. The length of stable jets increases with increasing applied voltage and flow rate, and decreases with increasing nozzle-to-substrate distance, while electrospray angles exhibit an opposite trend with respect to the stable jet lengths. The diameter of electrosprayed particles decreases with increasing applied voltage, and increases with flow rate. Furthermore, an alcohol gas sensor is presented. The ZnAc is calcined into ZnO, which reveals good repeatability and stability of response in target gas. The sensing response, defined as the resistance ratio of R0/Rg, where R0 and Rg are resistance of ZnO in air and alcohol gas, increases with the concentration of alcohol vapors and electrospray deposition time. View Full-Text
Keywords: electrospray; ZnO; gas sensor; semiconductor electrospray; ZnO; gas sensor; semiconductor
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MDPI and ACS Style

Li, W.; Lin, J.; Wang, X.; Jiang, J.; Guo, S.; Zheng, G. Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors. Micromachines 2018, 9, 66. https://doi.org/10.3390/mi9020066

AMA Style

Li W, Lin J, Wang X, Jiang J, Guo S, Zheng G. Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors. Micromachines. 2018; 9(2):66. https://doi.org/10.3390/mi9020066

Chicago/Turabian Style

Li, Wenwang; Lin, Jinghua; Wang, Xiang; Jiang, Jiaxin; Guo, Shumin; Zheng, Gaofeng. 2018. "Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors" Micromachines 9, no. 2: 66. https://doi.org/10.3390/mi9020066

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