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Journal: Micromachines, 2017
Volume: 8
Number: 203
203
Article: Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
Authors: by Miguel Lara-Castro, Adrian Herrera-Amaya, Marco A. Escarola-Rosas, Moisés Vázquez-Toledo, Francisco López-Huerta, Luz A. Aguilera-Cortés and Agustín L. Herrera-May
Link: https://www.mdpi.com/2072-666X/8/7/203

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