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Journal: Micromachines, 2017
Volume: 8
Number: 201

Article: A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications
Authors: by Xin-Ge Guo, Zai-Fa Zhou, Chao Sun, Wei-Hua Li and Qing-An Huang
Link: https://www.mdpi.com/2072-666X/8/7/201

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