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Journal: MicromachinesVolume: 8Number: 170
Article: Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization
  • Authors:
  • Matthew Bahr1,*,
  • Yasa Sampurno1,2 and
  • Ruochen Han1
  • et al.
Link: https://www.mdpi.com/2072-666X/8/6/170

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