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Journal: Micromachines, 2017
Volume: 8
Number: 170

Article: Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization
Authors: by Matthew Bahr, Yasa Sampurno, Ruochen Han and Ara Philipossian
Link: https://www.mdpi.com/2072-666X/8/6/170

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