Next Article in Journal
Fabrication of Cell-Laden Hydrogel Fibers with Controllable Diameters
Next Article in Special Issue
Chiral Orientation of Skeletal Muscle Cells Requires Rigid Substrate
Previous Article in Journal
Investigation of Au/Si Eutectic Wafer Bonding for MEMS Accelerometers
Previous Article in Special Issue
A Feasibility Study on the Simultaneous Sensing of Turbidity and Chlorophyll a Concentration Using a Simple Optical Measurement Method
Open AccessArticle

A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter

State Key Lab of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
Department of Biomedical Engineering, National University of Singapore, Block E4, #04-08, 4 Engineering Drive 3, Singapore 117583, Singapore
Institute of Microelectronics, A*STAR, 11 Science Park Road, Science Park II, Singapore 117685, Singapore
Author to whom correspondence should be addressed.
Academic Editors: Wei Wang and Nam-Trung Nguyen
Micromachines 2017, 8(5), 160;
Received: 1 March 2017 / Revised: 25 April 2017 / Accepted: 12 May 2017 / Published: 17 May 2017
(This article belongs to the Special Issue Optofluidics 2016)
A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. View Full-Text
Keywords: waveguides; photonics sensor; gas detection; optical MEMS waveguides; photonics sensor; gas detection; optical MEMS
Show Figures

Figure 1

MDPI and ACS Style

Qiao, Y.; Tao, J.; Chen, C.-H.; Qiu, J.; Tian, Y.; Hong, X.; Wu, J. A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter. Micromachines 2017, 8, 160.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

Back to TopTop