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Micromachines 2017, 8(3), 90;

Tip-Based Nanofabrication for Scalable Manufacturing

Department of Science and Solutions, IBM T.J. Watson Research Center, Yorktown Heights, NY 10598, USA
Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Korea
The Center for Nanophase Materials Sciences and The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Author to whom correspondence should be addressed.
Academic Editors: Chang-Hwan Choi, Ishan Wathuthanthri and Ke Du
Received: 13 December 2016 / Revised: 20 February 2017 / Accepted: 5 March 2017 / Published: 16 March 2017
(This article belongs to the Special Issue Scalable Micro/Nano Patterning)
Full-Text   |   PDF [10519 KB, uploaded 17 March 2017]   |  


Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology. View Full-Text
Keywords: tip-based nanofabrication; scanning probe lithography; scalable nanomanufacturing; atomic force microscope; scanning tunneling microscope tip-based nanofabrication; scanning probe lithography; scalable nanomanufacturing; atomic force microscope; scanning tunneling microscope

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Hu, H.; Kim, H.J.; Somnath, S. Tip-Based Nanofabrication for Scalable Manufacturing. Micromachines 2017, 8, 90.

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