Tip-Based Nanofabrication for Scalable Manufacturing
Department of Science and Solutions, IBM T.J. Watson Research Center, Yorktown Heights, NY 10598, USA
Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Korea
The Center for Nanophase Materials Sciences and The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Author to whom correspondence should be addressed.
Academic Editors: Chang-Hwan Choi, Ishan Wathuthanthri and Ke Du
Received: 13 December 2016 / Revised: 20 February 2017 / Accepted: 5 March 2017 / Published: 16 March 2017
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
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MDPI and ACS Style
Hu, H.; Kim, H.J.; Somnath, S. Tip-Based Nanofabrication for Scalable Manufacturing. Micromachines 2017, 8, 90.
Hu H, Kim HJ, Somnath S. Tip-Based Nanofabrication for Scalable Manufacturing. Micromachines. 2017; 8(3):90.
Hu, Huan; Kim, Hoe J.; Somnath, Suhas. 2017. "Tip-Based Nanofabrication for Scalable Manufacturing." Micromachines 8, no. 3: 90.
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