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Micromachines 2017, 8(3), 78;

Fast-Response Electrostatic Actuator Based on Nano-Gap

Lab Thin Ferroelectric Films Structure, Institute of Automation and Electrometry, Russian Academy of Science, Siberian Branch, Koptug Prosp.1, Novosibirsk 630090, Russia
Author to whom correspondence should be addressed.
Academic Editor: Andreas Richter
Received: 27 December 2016 / Revised: 22 February 2017 / Accepted: 28 February 2017 / Published: 3 March 2017
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The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented. View Full-Text
Keywords: electrostatic actuator; large force; nanometer gap; ferroelectric; fast driver electrostatic actuator; large force; nanometer gap; ferroelectric; fast driver

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Kostsov, E.; Sokolov, A. Fast-Response Electrostatic Actuator Based on Nano-Gap. Micromachines 2017, 8, 78.

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