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Journal: Micromachines, 2017
Volume: 8
Number: 77
Article:
Design and Fabrication of a Slanted-Beam MEMS Accelerometer
Authors:
by
Wei Xu, Jie Yang, Guofen Xie, Bin Wang, Mingshan Qu, Xuguang Wang, Xianxue Liu and Bin Tang
Link:
https://www.mdpi.com/2072-666X/8/3/77
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