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Journal: Micromachines, 2017
Volume: 8
Number: 294

Article: Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining
Authors: by Adam Inzelberg and Yoav Linzon
Link: https://www.mdpi.com/2072-666X/8/10/294

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