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Micromachines 2016, 7(9), 160;

Micromachined Resonators: A Review

Dynamic Microsystems Lab, Department of Electrical and Computer Engineering, University of Central Florida, Orlando, FL 32816, USA
School of Mechatronic Systems Engineering, Simon Fraser University, Surrey, BC V3T 0A3, Canada
State Key Laboratory of Millimeter Waves, City University of Hong Kong, Kowloon, Hong Kong, China
Department of Electrical Engineering, École de Technologie Supeérieure, Montreal, QC H3C 1K3, Canada
Author to whom correspondence should be addressed.
Academic Editor: Joost Lötters
Received: 2 June 2016 / Revised: 24 July 2016 / Accepted: 25 July 2016 / Published: 8 September 2016
(This article belongs to the Special Issue Microresonators)


This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material. View Full-Text
Keywords: resonance; microresonators; micro-electro-mechanical systems resonance; microresonators; micro-electro-mechanical systems

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Abdolvand, R.; Bahreyni, B.; Lee, J.E.-Y.; Nabki, F. Micromachined Resonators: A Review. Micromachines 2016, 7, 160.

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