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Journal: Micromachines, 2016
Volume: 7
Number: 57
Article:
Resonant Varifocal Micromirror with Piezoresistive Focus Sensor
Authors:
by
Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya and Kazuhiro Hane
Link:
https://www.mdpi.com/2072-666X/7/4/57
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