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Journal: Micromachines, 2016
Volume: 7
Number: 231
Article:
The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
Authors:
by
Da Chen, Wenwen Ren, Shuren Song, Jingjing Wang, Weihui Liu and Peng Wang
Link:
https://www.mdpi.com/2072-666X/7/12/231
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