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Journal: Micromachines, 2016
Volume: 7
Number: 222
Article:
Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
Authors:
by
Sasha Hoshian, Cristina Gaspar, Teemu Vasara, Farzin Jahangiri, Ville Jokinen and Sami Franssila
Link:
https://www.mdpi.com/2072-666X/7/12/222
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