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Journal: Micromachines, 2014
Volume: 5
Number: 1310
Article:
SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use
Authors:
by
Thomas Winterstein, Matthias Staab, Christian Nakic, Hans-Jürgen Feige, Jürgen Vogel and Helmut F. Schlaak
Link:
https://www.mdpi.com/2072-666X/5/4/1310
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