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Journal: Micromachines, 2026
Volume: 17
Number: 719

Article: Simulation and Analysis of a Silicon Membrane-Supported Beam–Island Diaphragm for Graphene Piezoresistive MEMS Microphones in High-SPL Acoustic Sensing
Authors: by Shengsheng Wei, Chunyuan Li, Yipeng Wang, Junqiang Wang and Mengwei Li
Link: https://www.mdpi.com/2072-666X/17/6/719

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