Lei, P.; Ji, B.; Hou, J.; Liu, M.; Deng, W.; Fan, F.; Wang, J.; Zhong, B.
High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing. Micromachines 2026, 17, 298.
https://doi.org/10.3390/mi17030298
AMA Style
Lei P, Ji B, Hou J, Liu M, Deng W, Fan F, Wang J, Zhong B.
High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing. Micromachines. 2026; 17(3):298.
https://doi.org/10.3390/mi17030298
Chicago/Turabian Style
Lei, Pengli, Baojian Ji, Jing Hou, Mincai Liu, Wenhui Deng, Fei Fan, Jian Wang, and Bo Zhong.
2026. "High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing" Micromachines 17, no. 3: 298.
https://doi.org/10.3390/mi17030298
APA Style
Lei, P., Ji, B., Hou, J., Liu, M., Deng, W., Fan, F., Wang, J., & Zhong, B.
(2026). High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing. Micromachines, 17(3), 298.
https://doi.org/10.3390/mi17030298