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Journal: Micromachines, 2026
Volume: 17
Number: 170

Article: Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS–SOI–MEMS Thermal Infrared Sensors
Authors: by Moshe Avraham and Yael Nemirovsky
Link: https://www.mdpi.com/2072-666X/17/2/170

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