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Journal: Micromachines, 2025
Volume: 16
Number: 1072
Article:
Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression
Authors:
by
Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu and Wenjiang Shen
Link:
https://www.mdpi.com/2072-666X/16/9/1072
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