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Journal: Micromachines, 2025
Volume: 16
Number: 1027

Article: Effect of Bias Voltage on the Crystal Growth of AlN(002) Thin Films Fabricated by Reactive Magnetron Sputtering
Authors: by Yong Du, Haowen Zou, Tiejun Li and Guifang Shao
Link: https://www.mdpi.com/2072-666X/16/9/1027

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