Xi, J.; Ban, X.; Hui, Z.; Ba, W.; Deng, L.; Qiu, H.
Investigating Surface Morphology and Subsurface Damage Evolution in Nanoscratching of Single-Crystal 4H-SiC. Micromachines 2025, 16, 935.
https://doi.org/10.3390/mi16080935
AMA Style
Xi J, Ban X, Hui Z, Ba W, Deng L, Qiu H.
Investigating Surface Morphology and Subsurface Damage Evolution in Nanoscratching of Single-Crystal 4H-SiC. Micromachines. 2025; 16(8):935.
https://doi.org/10.3390/mi16080935
Chicago/Turabian Style
Xi, Jianpu, Xinxing Ban, Zhen Hui, Wenlan Ba, Lijuan Deng, and Hui Qiu.
2025. "Investigating Surface Morphology and Subsurface Damage Evolution in Nanoscratching of Single-Crystal 4H-SiC" Micromachines 16, no. 8: 935.
https://doi.org/10.3390/mi16080935
APA Style
Xi, J., Ban, X., Hui, Z., Ba, W., Deng, L., & Qiu, H.
(2025). Investigating Surface Morphology and Subsurface Damage Evolution in Nanoscratching of Single-Crystal 4H-SiC. Micromachines, 16(8), 935.
https://doi.org/10.3390/mi16080935