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Journal: Micromachines, 2025
Volume: 16
Number: 879
Article:
Hydrothermal Engineering of Ferroelectric PZT Thin Films Tailoring Electrical and Ferroelectric Properties via TiO2 and SrTiO3 Interlayers for Advanced MEMS
Authors:
by
Chun-Lin Li and Guo-Hua Feng
Link:
https://www.mdpi.com/2072-666X/16/8/879
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