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Journal: MicromachinesVolume: 16Number: 879
Article: Hydrothermal Engineering of Ferroelectric PZT Thin Films Tailoring Electrical and Ferroelectric Properties via TiO2 and SrTiO3 Interlayers for Advanced MEMS
  • Authors:
  • Chun-Lin Li1 and
  • Guo-Hua Feng1,2,*
Link: https://www.mdpi.com/2072-666X/16/8/879

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