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Journal: Micromachines, 2025
Volume: 16
Number: 879

Article: Hydrothermal Engineering of Ferroelectric PZT Thin Films Tailoring Electrical and Ferroelectric Properties via TiO2 and SrTiO3 Interlayers for Advanced MEMS
Authors: by Chun-Lin Li and Guo-Hua Feng
Link: https://www.mdpi.com/2072-666X/16/8/879

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