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Journal: Micromachines, 2025
Volume: 16
Number: 854
Article:
Design and Static Analysis of MEMS-Actuated Silicon Nitride Waveguide Optical Switch
Authors:
by
Yan Xu, Tsen-Hwang Andrew Lin and Peiguang Yan
Link:
https://www.mdpi.com/2072-666X/16/8/854
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