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Journal: Micromachines, 2025
Volume: 16
Number: 798
798
Article: A Hierarchical Inverse Lithography Method Considering the Optimization and Manufacturability Limit by Gradient Descent
Authors: by Haifeng Sun, Qingyan Zhang, Jie Zhou, Jianwen Gong, Chuan Jin, Ji Zhou and Junbo Liu
Link: https://www.mdpi.com/2072-666X/16/7/798

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